Electron-beam physical vapor deposition of diamond-like carbon coatings on Si substrates | Zendy

Stanislava Rabadzhyiska | Zendy; Georgi Kotlarski | Zendy; Stefan Valkov | Zendy; Maria Ormanova | Zendy; Мaria Shipochka | Zendy; Petеr Petrov | Zendy

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Electron-beam physical vapor deposition of diamond-like carbon coatings on Si substrates

Author(s) -

Stanislava Rabadzhyiska,

Georgi Kotlarski,

Stefan Valkov,

Maria Ormanova,

Мaria Shipochka,

Petеr Petrov

Publication year - 2022

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/5.0094838

Subject(s) - x ray photoelectron spectroscopy , fourier transform infrared spectroscopy , chemical vapor deposition , diamond , materials science , diamond like carbon , carbon fibers , graphite , analytical chemistry (journal) , deposition (geology) , electron beam physical vapor deposition , silicon , infrared spectroscopy , fourier transform spectroscopy , infrared , thin film , chemical engineering , nanotechnology , chemistry , optics , composite material , optoelectronics , organic chemistry , paleontology , sediment , composite number , engineering , biology , physics

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