Open AccessQuantification of ionic-liquid ion source beam composition from time-of-flight data
Author(s) -
Oliver Jia-Richards
Publication year - 2022
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0094699
Subject(s) - ion , ion beam , beam (structure) , evaporation , ion source , microfabrication , materials science , ion beam deposition , ionic liquid , analytical chemistry (journal) , ionic bonding , chemical physics , chemistry , physics , chromatography , optics , thermodynamics , organic chemistry , medicine , alternative medicine , pathology , fabrication , catalysis
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