Open AccessRefractory metal-based ohmic contacts on β -Ga2O3 using TiW
Author(s) -
Kornelius Tetzner,
Robert Schewski,
Andreas Popp,
Saud Bin Anooz,
TaShun Chou,
Ina Ostermay,
Holm Kirmse,
Joachim Würfl
Publication year - 2022
Publication title -
apl materials
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/5.0094661
Subject(s) - materials science , ohmic contact , annealing (glass) , contact resistance , amorphous solid , transmission electron microscopy , crystallinity , composite material , metallurgy , analytical chemistry (journal) , crystallography , nanotechnology , layer (electronics) , chemistry , chromatography
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