Open AccessA miniature piezoelectric pump with high performance
Author(s) -
Zhigang Yang,
Luntao Dong,
Meng Wang,
Xingqi Li,
Xiaopeng Liu,
Guojun Liu
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0094633
Subject(s) - unimorph , piezoelectricity , materials science , cantilever , check valve , acoustics , miniaturization , voltage , volumetric flow rate , piezoelectric coefficient , mechanical engineering , electrical engineering , mechanics , engineering , composite material , physics , nanotechnology
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