Open AccessEffects of the excited states on electron kinetics and power absorption and dissipation in inductively coupled Ar plasmas
Author(s) -
Wei Yang,
Fei Gao,
YouNian Wang
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0092556
Subject(s) - excited state , atomic physics , ground state , electron , absorption (acoustics) , plasma , chemistry , electron temperature , electron density , materials science , physics , quantum mechanics , composite material
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