Open AccessContacted resistance measurements for the quantification of boron-hydrogen pairs in crystalline silicon
Author(s) -
Clemens Winter,
Axel Herguth
Publication year - 2022
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0089294
Subject(s) - boron , silicon , impurity , hydrogen , materials science , crystalline silicon , analytical chemistry (journal) , spreading resistance profiling , molecular physics , chemical physics , optoelectronics , chemistry , organic chemistry , chromatography
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