Open AccessInline characterization of stacking faults in EpiWafers
Author(s) -
Saed Al-Hajjawi,
Jonas Haunschild,
Alexandra Wörnhör,
R. Sorgenfrei,
Hans Schremmer,
Stefan Rein
Publication year - 2022
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0089281
Subject(s) - stacking , characterization (materials science) , computer science , materials science , nanotechnology , nuclear magnetic resonance , physics
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