Open AccessErratum: “Characterization of an RF excited broad beam ion source operating with inert gases” [J. Appl. Phys. 129, 223305 (2021)]
Author(s) -
Erik Rohkamm,
D. Spemann,
Frank Scholze,
Frank Frost
Publication year - 2022
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0089145
Subject(s) - excited state , characterization (materials science) , inert , atomic physics , inert gas , ion , materials science , beam (structure) , ion beam , physics , nanotechnology , optics , quantum mechanics , composite material
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