Kinetic Monte Carlo modeling of oxide thin film growth
Author(s) -
John A. Purton,
Alin M. Elena,
Gilberto Teobaldi
Publication year - 2022
Publication title -
the journal of chemical physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.071
H-Index - 357
eISSN - 1089-7690
pISSN - 0021-9606
DOI - 10.1063/5.0089043
Subject(s) - kinetic monte carlo , thin film , oxide , materials science , monte carlo method , chemical physics , nanotechnology , substrate (aquarium) , chemistry , statistics , mathematics , oceanography , geology , metallurgy
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