Open AccessThe detection of buried nanopillar based on electrostatic force microscopy simulation
Author(s) -
Yongzhen Luo,
Guocong Lin,
Xidong Ding,
Tao Su
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0088843
Subject(s) - nanopillar , multiphysics , materials science , dielectric , optics , nanostructure , nanotechnology , optoelectronics , finite element method , physics , structural engineering , engineering
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