Open AccessStress tuning in sputter-grown Cu and W films for Cu/W nanomultilayer design
Author(s) -
Giacomo Lorenzin,
Lars P. H. Jeurgens,
Claudia Cancellieri
Publication year - 2022
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0088203
Subject(s) - thin film , materials science , stress (linguistics) , sputter deposition , wafer , sputtering , composite material , ultimate tensile strength , fabrication , metallurgy , optoelectronics , nanotechnology , philosophy , linguistics , medicine , alternative medicine , pathology
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