Open AccessFast homoepitaxial growth of (100) β-Ga2O3 thin films via MOVPE
Author(s) -
TaShun Chou,
Palvan Seyidov,
Saud Bin Anooz,
Raimund Grüneberg,
Thi Thuy Vi Tran,
K. Irmscher,
M. Albrecht,
Zbigniew Galazka,
Jutta Schwarzkopf,
Andreas Popp
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0069243
Subject(s) - metalorganic vapour phase epitaxy , epitaxy , materials science , doping , analytical chemistry (journal) , growth rate , secondary ion mass spectrometry , thin film , diffusion , electron mobility , optoelectronics , nanotechnology , ion , chemistry , layer (electronics) , geometry , mathematics , organic chemistry , chromatography , physics , thermodynamics
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