Open AccessPulsed laser deposition of large-sized superlattice films with high uniformity
Author(s) -
Biying Ye,
Tian Miao,
Yi Zhu,
Haiming Huang,
Yulong Yang,
Mingming Shuai,
Zhifei Zhu,
Hangwen Guo,
Wenbin Wang,
Yinyan Zhu,
Lifeng Yin,
Jian Shen
Publication year - 2021
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/5.0068795
Subject(s) - superlattice , materials science , pulsed laser deposition , optoelectronics , laser , thin film , oxide , fabrication , deposition (geology) , substrate (aquarium) , optics , epitaxy , nanotechnology , layer (electronics) , medicine , paleontology , oceanography , physics , alternative medicine , pathology , sediment , geology , metallurgy , biology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom