Open AccessTaking internally wetted capillary electrospray emitters to the sub-ten-micrometer scale with 3D microlithography
Author(s) -
Fynn L. Kunze,
Torsten Henning,
Peter J. Klar
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0066619
Subject(s) - fabrication , photolithography , materials science , electrospray , microplasma , capillary action , microfabrication , optoelectronics , electric field , lithography , nanotechnology , planar , mass spectrometry , chemistry , composite material , computer science , plasma , chromatography , physics , pathology , medicine , alternative medicine , quantum mechanics , computer graphics (images)
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