Open AccessDevelopment of digitally processed DC reactive sputtering and its application to the synthesis of (Er0.1Y0.9)2SiO5 layered crystalline thin film
Author(s) -
Hideo Isshiki,
Yasuhito Tanaka,
Tomoki Kasumi,
Ghent Nakamura,
Shinichiro Saisho
Publication year - 2021
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0065975
Subject(s) - sputtering , thin film , materials science , deposition (geology) , layer (electronics) , pulsed laser deposition , photoluminescence , sputter deposition , optoelectronics , analytical chemistry (journal) , chemistry , nanotechnology , paleontology , chromatography , sediment , biology
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