Open AccessLiving up to its potential—Direct-write nanofabrication with focused electron beams
Author(s) -
Michael Huth,
Fabrizio Porrati,
Sven Barth
Publication year - 2021
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0064764
Subject(s) - nanotechnology , nanolithography , materials science , computer science , fabrication , medicine , alternative medicine , pathology
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