Open AccessProperties of AZO thin films prepared by stationary and rotating RF magnetized plasma sputtering source
Author(s) -
Md. Amzad Hossain,
Md Abdul Majed Patwary,
M.M. Rahman,
Yasunori Ohtsu
Publication year - 2022
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0064434
Subject(s) - materials science , wurtzite crystal structure , sputtering , thin film , transmittance , analytical chemistry (journal) , raman spectroscopy , surface roughness , optics , sputter deposition , zinc , optoelectronics , chemistry , composite material , nanotechnology , physics , chromatography , metallurgy
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