Open AccessTime-resolved evolution of plasma parameters in a plasma immersion ion implantation source
Author(s) -
J. Moreno,
Ayub Khodaee,
D. Okerstrom,
Michael P. Bradley,
Lénaïc Couëdel
Publication year - 2021
Publication title -
physics of plasmas
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.75
H-Index - 160
eISSN - 1089-7674
pISSN - 1070-664X
DOI - 10.1063/5.0063610
Subject(s) - plasma , physics , atomic physics , amplitude , langmuir probe , plasma channel , plasma parameters , instability , electron temperature , plasma diagnostics , two stream instability , atmospheric pressure plasma , electron , argon , optics , mechanics , quantum mechanics
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