Open AccessStrongly enhanced second-order optical nonlinearity in CMOS-compatible Al1−xScxN thin films
Author(s) -
Valerie Yoshioka,
Jian Lu,
Zichen Tang,
Jicheng Jin,
Roy H. Olsson,
Bo Zhen
Publication year - 2021
Publication title -
apl materials
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/5.0061787
Subject(s) - materials science , optoelectronics , photonics , cmos , silicon nitride , thin film , silicon photonics , nitride , doping , silicon , nanotechnology , layer (electronics)
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