Open AccessExperimental and numerical study of the plasma in coaxial capacitive coupled radio frequency discharge
Author(s) -
Sara Alhomsi,
G. Bauville,
S. Pasquiers,
Tiberiu Minea
Publication year - 2021
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0060781
Subject(s) - plasma , coaxial , materials science , cylinder , capacitive sensing , perpendicular , argon , atomic physics , debye sheath , ion , optics , physics , electrical engineering , mechanical engineering , geometry , mathematics , quantum mechanics , engineering
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