Open AccessStudy of structural and electrical properties of ferroelectric HZO films obtained by single-target sputtering
Author(s) -
Mohammed-Bilal Hachemi,
B. Salem,
Vincent Consonni,
Hervé Roussel,
Alexandra Garraud,
Gauthier Lefèvre,
S. Labau,
Skandar Basrour,
A. Bsiesy
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0058656
Subject(s) - tin , materials science , sputtering , thin film , x ray photoelectron spectroscopy , annealing (glass) , ferroelectricity , analytical chemistry (journal) , zirconium , optoelectronics , dielectric , chemistry , nuclear magnetic resonance , nanotechnology , metallurgy , chromatography , physics
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