Open AccessMethods to achieve ultra-high quality factor silicon nitride resonators
Author(s) -
Xingchen Ji,
Samantha P. Roberts,
Mateus CoratoZanarella,
Michal Lipson
Publication year - 2021
Publication title -
apl photonics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 2.094
H-Index - 34
ISSN - 2378-0967
DOI - 10.1063/5.0057881
Subject(s) - resonator , materials science , optoelectronics , cladding (metalworking) , q factor , waveguide , photonics , microfabrication , silicon nitride , silicon , electronic engineering , optics , fabrication , engineering , physics , medicine , alternative medicine , pathology , metallurgy
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom