Open AccessPhoto-assisted O− and Al− production with a cesium sputter ion source
Author(s) -
O. Tarvainen,
R. Kronholm,
Mikko Laitinen,
M. Reponen,
Jaakko Julin,
V. Toivanen,
Mari Napari,
M. Marttinen,
T. Kalvas,
Dan Faircloth,
H. Koivisto,
Timo Sajavaara
Publication year - 2021
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0057495
Subject(s) - ion , sputtering , caesium , atomic physics , laser , ion beam , ion source , ion beam deposition , ion gun , materials science , cathode , xenon , optoelectronics , chemistry , optics , thin film , physics , nanotechnology , inorganic chemistry , organic chemistry
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom