Open AccessPlasma electrode shape suitable for plasma electrode performance study
Author(s) -
K. Bito,
M. Sasao,
M. Kisaki,
M. Wada
Publication year - 2021
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0057489
Subject(s) - plasma , electrode , ion , materials science , atomic physics , molybdenum , ion current , current (fluid) , ion source , ion beam , analytical chemistry (journal) , chemistry , physics , metallurgy , organic chemistry , chromatography , quantum mechanics , thermodynamics
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