Open AccessExperimental results of 40 kW, 1 MHz solid state high frequency power supply with inductively coupled plasma
Author(s) -
S. Gajjar,
Dishang Upadhyay,
Narinder Singh,
Mahendrajit Singh,
A. Gahlaut,
K. Pandya,
M. Bhuyan,
Ravinder Yadav,
Himanshu Tyagi,
M. Vuppugalla,
A. Thakar,
Amit Patel,
B. Raval,
Rajesh N. Davé,
H. Dhola,
K. Mehta,
N. Goswami,
Vikrant Gupta,
M. Bandyopadhya,
Arun Chakraborty,
U.K. Baruah
Publication year - 2021
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0057477
Subject(s) - impedance matching , electrical impedance , electrical engineering , power (physics) , materials science , inductive coupling , output impedance , radio frequency , electronic engineering , engineering , physics , quantum mechanics
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