Open AccessVelocity distribution function of hydrogen atoms in ion source discharges
Author(s) -
Tatsuhiro Tokai,
Yuji Shimabukuro,
Hidenori Takahashi,
K. Bito,
M. Wada
Publication year - 2021
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0057452
Subject(s) - atomic physics , ion , hydrogen , plasma , ion source , electron multiplier , chemistry , mass spectrum , ion gun , electron , separator (oil production) , spectral line , analytical chemistry (journal) , physics , nuclear physics , organic chemistry , chromatography , astronomy , thermodynamics
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