Open AccessDevelopment of a flexure-based nano-actuator for high-frequency high-resolution directional sensing with atomic force microscopy
Author(s) -
Amir Farokh Payam,
Luca Piantanida,
Kislon Voı̈tchovsky
Publication year - 2021
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/5.0057032
Subject(s) - scanner , actuator , fabrication , materials science , optics , nanoscopic scale , vibration , calibration , nanometre , scanning probe microscopy , interface (matter) , resolution (logic) , image resolution , sample (material) , acoustics , nanotechnology , physics , computer science , medicine , alternative medicine , pathology , quantum mechanics , capillary number , artificial intelligence , capillary action , composite material , thermodynamics
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