Open AccessSingle-step etched grating couplers for silicon nitride loaded lithium niobate on insulator platform
Author(s) -
Xu Han,
Yongheng Jiang,
Andreas Frigg,
Huifu Xiao,
Pu Zhang,
Andreas Boes,
Thach G. Nguyen,
Jianhong Yang,
Guanghui Ren,
Yikai Su,
Arnan Mitchell,
Yonghui Tian
Publication year - 2021
Publication title -
apl photonics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.094
H-Index - 34
ISSN - 2378-0967
DOI - 10.1063/5.0055213
Subject(s) - materials science , grating , lithium niobate , fabrication , optoelectronics , silicon nitride , wafer , optics , birefringence , silicon , medicine , alternative medicine , physics , pathology
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