Open AccessTemperature and humidity sensor based on MEMS technology
Author(s) -
Dongyan Zhao,
Yubo Wang,
Jin Shao,
Peng Zhang,
Yanning Chen,
Zhen Fu,
Shuaipeng Wang,
Wenlong Zhao,
Zhimei Zhou,
Yuandong Yuan,
Dengyuan Fu,
Yinfang Zhu
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0053342
Subject(s) - humidity , materials science , relative humidity , capacitive sensing , microelectromechanical systems , sensitivity (control systems) , optoelectronics , microporous material , electrode , atmospheric temperature range , temperature measurement , capacitance , electronic engineering , electrical engineering , composite material , meteorology , chemistry , physics , quantum mechanics , engineering
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