Open AccessCharacterization of an RF excited broad beam ion source operating with inert gases
Author(s) -
Erik Rohkamm,
D. Spemann,
Frank Scholze,
Frank Frost
Publication year - 2021
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0052758
Subject(s) - ion source , ion beam deposition , faraday cup , ion , ion beam , ion gun , atomic physics , ion current , beam (structure) , mass spectrometry , chemistry , ion beam mixing , materials science , analytical chemistry (journal) , physics , optics , organic chemistry , chromatography
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