Open AccessStress engineering of boron doped diamond thin films via micro-fabrication
Author(s) -
Fabio Isa,
James P. Best,
Anna Marzegalli,
Marco Albani,
Christophe Comte,
Jamie J. Kruzic,
Avi Bendavid
Publication year - 2021
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/5.0051196
Subject(s) - materials science , diamond , fabrication , doping , boron , thin film , stress (linguistics) , raman spectroscopy , nanotechnology , optoelectronics , ion implantation , composite material , ion , optics , medicine , linguistics , chemistry , alternative medicine , philosophy , organic chemistry , physics , pathology , quantum mechanics
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