Open AccessDeeply sub-wavelength non-contact optical metrology of sub-wavelength objects
Author(s) -
Carolina RendónBarraza,
Eng Aik Chan,
Guang Yuan,
Giorgio Adamo,
Tanchao Pu,
Nikolay I. Zheludev
Publication year - 2021
Publication title -
apl photonics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.094
H-Index - 34
ISSN - 2378-0967
DOI - 10.1063/5.0048139
Subject(s) - metrology , optics , opacity , diffraction , wavelength , lithography , interferometry , laser , astronomical interferometer , materials science , microscope , physics , optoelectronics
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