Open AccessMicrostructure and mechanical properties of atomic layer deposited alumina doped zirconia
Author(s) -
HelleMai Piirsoo,
Taivo Jõgiaas,
Hugo Mändar,
Peeter Ritslaid,
Kaupo Kukli,
Aile Tamm
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0047572
Subject(s) - materials science , microstructure , cubic zirconia , tetragonal crystal system , amorphous solid , doping , elastic modulus , substrate (aquarium) , layer (electronics) , composite material , tin , thin film , nanoindentation , grain size , chemical engineering , crystallography , crystal structure , metallurgy , nanotechnology , ceramic , chemistry , optoelectronics , oceanography , engineering , geology
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