Open AccessThe effect of the Q factor on the air humidity in the microcantilever sensorocantilever sensor
Author(s) -
Agus Setyo Budi,
Hadi Nasbey,
Dina Ramadhini Rinaldy,
Ratno Nuryadi,
Rina Dewi Mayasari,
Aditya Eka Mulyono,
Yuwana Pradana
Publication year - 2021
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0045338
Subject(s) - humidity , q factor , materials science , relative humidity , sensitivity (control systems) , air humidity , analytical chemistry (journal) , optoelectronics , chemistry , physics , meteorology , electronic engineering , resonator , engineering , environmental chemistry
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