Open AccessObtaining simultaneously high crystallinity and sub-bandgap absorption in femtosecond laser hyperdoped black silicon using ion beam etching
Author(s) -
Simon Paulus,
Patrick Mc Kearney,
F. Völklein,
Stefan Kontermann
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0044678
Subject(s) - silicon , materials science , femtosecond , crystallinity , black silicon , optoelectronics , raman spectroscopy , etching (microfabrication) , amorphous silicon , amorphous solid , absorption (acoustics) , laser , ion implantation , analytical chemistry (journal) , crystalline silicon , ion , optics , chemistry , nanotechnology , physics , organic chemistry , layer (electronics) , composite material , chromatography
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom