Open AccessMulti-parameter coupling study of magnetron sputtering nickel–chromium thin film based on Taguchi-gray correlation method
Author(s) -
Ding Song,
Wenge Wu,
Zhiqiang Ren,
Yunping Cheng,
Lijuan Liu
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0043898
Subject(s) - taguchi methods , materials science , chromium , sputter deposition , nickel , surface roughness , thin film , sputtering , metallurgy , electrical resistivity and conductivity , analytical chemistry (journal) , surface finish , composite material , chemistry , electrical engineering , nanotechnology , engineering , chromatography
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