Open AccessCurved-boundary particle-in-cell simulation for the investigation of the target erosion effect of DC magnetron sputtering system
Author(s) -
Young Hyun Jo,
Heesung Park,
Min Hur,
Hae June Lee
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0035172
Subject(s) - sputtering , erosion , yield (engineering) , materials science , ion , sputter deposition , particle (ecology) , plasma , high power impulse magnetron sputtering , particle in cell , atomic physics , mechanics , chemistry , metallurgy , physics , geology , nanotechnology , thin film , nuclear physics , geomorphology , oceanography , organic chemistry
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