Open AccessTuning material properties of amorphous zinc oxynitride thin films by magnesium addition
Author(s) -
A. Welk,
Anna Reinhardt,
Oliver Herrfurth,
Thorsten Schultz,
Holger von Wenckstern,
Norbert Koch,
Marius Grundmann
Publication year - 2021
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/5.0035147
Subject(s) - magnesium , materials science , amorphous solid , zinc , crystallite , thin film , sputter deposition , sputtering , analytical chemistry (journal) , inorganic chemistry , chemical engineering , metallurgy , nanotechnology , chemistry , crystallography , organic chemistry , engineering
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