Open AccessSputtering of Mo and Ag with xenon ions from a radio-frequency ion thruster
Author(s) -
Leonie Johanna Buntrock,
Chris Volkmar,
Klaus Hannemann
Publication year - 2021
Publication title -
review of scientific instruments
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.605
H-Index - 165
eISSN - 1089-7623
pISSN - 0034-6748
DOI - 10.1063/5.0031408
Subject(s) - sputtering , ion thruster , quartz crystal microbalance , materials science , spacecraft , sputter deposition , electrically powered spacecraft propulsion , ion , nuclear engineering , aerospace engineering , analytical chemistry (journal) , atomic physics , propulsion , thin film , physics , nanotechnology , chemistry , organic chemistry , adsorption , quantum mechanics , chromatography , engineering
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