Chemical composition and local atomic structure of ultrathin surface layers after implantation of argon and oxygen ions | Zendy

I. K. Averkiev | Zendy; О. Р. Бакиева | Zendy; А. А. Колотов | Zendy; D. V. Surnin | Zendy; В. В. Кривенцов | Zendy

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Chemical composition and local atomic structure of ultrathin surface layers after implantation of argon and oxygen ions

Author(s) -

I. K. Averkiev,

О. Р. Бакиева,

А. А. Колотов,

D. V. Surnin,

В. В. Кривенцов

Publication year - 2020

Publication title -

aip conference proceedings

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.177

H-Index - 75

eISSN - 1551-7616

pISSN - 0094-243X

DOI - 10.1063/5.0030463

Subject(s) - argon , x ray absorption fine structure , ion , oxygen , materials science , chemical state , analytical chemistry (journal) , spectroscopy , electron energy loss spectroscopy , irradiation , x ray photoelectron spectroscopy , absorption spectroscopy , atomic physics , chemistry , nanotechnology , nuclear magnetic resonance , optics , transmission electron microscopy , physics , organic chemistry , quantum mechanics , chromatography , nuclear physics

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