Open AccessDevelopment of sputter ion pump with strong magnetic field for obtaining of ultra-high vacuum
Author(s) -
Alexey Semenov,
В.В. Анашин,
А. А. Краснов
Publication year - 2020
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0030428
Subject(s) - sputtering , optoelectronics , materials science , ion , magnetic field , ultra high vacuum , physics , nanotechnology , thin film , quantum mechanics
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