Open AccessWide range tunable bandgap and composition β -phase (AlGa)2O3 thin film by thermal annealing
Author(s) -
CheHao Liao,
KuangHui Li,
Carlos G. TorresCastanedo,
Guozheng Zhang,
Xiaohang Li
Publication year - 2021
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/5.0027067
Subject(s) - annealing (glass) , materials science , sapphire , thin film , analytical chemistry (journal) , band gap , secondary ion mass spectrometry , transmission electron microscopy , secondary ion mass spectroscopy , optoelectronics , silicon , ion , nanotechnology , chemistry , optics , metallurgy , laser , organic chemistry , chromatography , physics
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