Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography
Author(s) -
Xiangyu Liu,
Zhujun Huang,
Xiaorui Zheng,
Davood Shahrjerdi,
Elisa Riedo
Publication year - 2021
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/5.0026159
Subject(s) - nanolithography , materials science , nanomanufacturing , fabrication , graphene , nanotechnology , lithography , etching (microfabrication) , transistor , nanoelectronics , field effect transistor , optoelectronics , electrical engineering , medicine , alternative medicine , engineering , pathology , layer (electronics) , voltage
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