Open AccessImpedance measurements with voltage and current probes on RF driven ICP torch
Author(s) -
Qiujiao Zhou,
Peng Zhao,
Chuanwen Geng,
Yuedong Meng
Publication year - 2020
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0021167
Subject(s) - oscilloscope , impedance matching , electrical impedance , torch , materials science , electromagnetic coil , voltage , impedance bridging , rf probe , rf power amplifier , plasma torch , inductively coupled plasma , electrical engineering , optoelectronics , plasma , damping factor , physics , engineering , amplifier , cmos , quantum mechanics , welding , metallurgy
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