Open AccessStainless microfluidic probe with 2D-array microapertures
Author(s) -
Koki Takahashi,
Shogo Kamiya,
Hidekuni Takao,
Fusao Shimokawa,
Kyohei Terao
Publication year - 2021
Publication title -
aip advances
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0014119
Subject(s) - materials science , aperture (computer memory) , fabrication , microfluidics , photolithography , stacking , etching (microfabrication) , nanotechnology , optics , optoelectronics , layer (electronics) , chemistry , medicine , physics , alternative medicine , organic chemistry , pathology , acoustics
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