Open AccessA film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
Author(s) -
Tai Nguyen,
Noureddine Adjeroud,
Sebastjan Glinšek,
Y.H. Fleming,
J. Guillot,
Patrick Grysan,
Jérôme PoleselMaris
Publication year - 2020
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/5.0011331
Subject(s) - materials science , atomic layer deposition , piezoelectricity , poling , thin film , nitride , texture (cosmology) , optoelectronics , piezoelectric coefficient , layer (electronics) , nanotechnology , composite material , ferroelectricity , dielectric , image (mathematics) , artificial intelligence , computer science
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