Open AccessStudy of the effect of normal load on friction coefficient and wear properties of CNx thin films
Author(s) -
Satyananda Kar,
Bibhuti B. Sahu,
Hiroyuki Kousaka,
Jeon G. Han,
Masaru Hori
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0009783
Subject(s) - materials science , thin film , sputter deposition , microstructure , friction coefficient , carbon nitride , sputtering , composite material , coefficient of friction , metallurgy , ball (mathematics) , tribology , nanotechnology , chemistry , mathematical analysis , biochemistry , mathematics , photocatalysis , catalysis
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