Open AccessFunctionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
Author(s) -
Toky Rabenimanana,
Vincent Walter,
Najib Kacem,
Patrice Le Moal,
Gilles Bourbon,
Joseph Lardiès
Publication year - 2020
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/5.0007446
Subject(s) - cantilever , sensitivity (control systems) , nonlinear system , materials science , aliasing , perturbation (astronomy) , optoelectronics , nanotechnology , physics , electronic engineering , computer science , quantum mechanics , engineering , composite material , artificial intelligence , undersampling
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