Open AccessFormation and preferential orientation of Au-free Al/Ti-based ohmic contacts on different hexagonal nitride-based heterostructures
Author(s) -
Filip Geenen,
A. Constant,
Eduardo Solano,
Davy Deduytsche,
Cristian Mocuta,
P. Coppens,
Christophe Detavernier
Publication year - 2020
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/5.0006003
Subject(s) - ohmic contact , materials science , heterojunction , nitride , epitaxy , optoelectronics , tin , annealing (glass) , wide bandgap semiconductor , contact resistance , gallium nitride , semiconductor , layer (electronics) , nanotechnology , metallurgy
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