Open AccessIon-beam-induced in-plane a-axis oriented (0001) AlN and ScAlN thin film BAW resonators
Author(s) -
Chiaki Masamune,
Takahiko Yanagitani
Publication year - 2021
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/5.0002307
Subject(s) - materials science , sputtering , optics , diffraction , plane (geometry) , texture (cosmology) , ion beam , thin film , full width at half maximum , ion , resonator , beam (structure) , optoelectronics , chemistry , physics , geometry , nanotechnology , mathematics , organic chemistry , artificial intelligence , computer science , image (mathematics)
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